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Title page for ETD etd-12042009-113800

Type of Document Master's Thesis
Author Dodds, Nathaniel Anson
Author's Email Address nathaniel.dodds@vanderbilt.edu
URN etd-12042009-113800
Title Charge generation by secondary particles from nuclear reactions in back end of line materials
Degree Master of Science
Department Electrical Engineering
Advisory Committee
Advisor Name Title
Marcus Mendenhall Committee Member
Robert Reed Committee Member
  • Monte Carlo
  • nuclear reactions
  • tungsten
  • MRED
  • single event effects
  • energy dependence
Date of Defense 2009-11-04
Availability unrestricted
Direct charge collection measurements are presented which prove that the presence of tungsten near sensitive volumes leads to extreme charge collection events through nuclear reactions. We demonstrate that, for a fixed incident particle linear energy transfer (LET), increasing particle energy beyond a certain point causes a decrease in nuclear reaction-induced charge collection. This suggests that a worst-case energy exists for single-event effect susceptibility, which depends on the technology, device layout, and the incident ions’ fixed LET value. A Monte Carlo approach for identifying the worst-case energy is applied to certain bulk-Si and silicon-on-insulator technologies. Simulation results suggest that the decrease in charge collection beyond the worst-case energy occurs because the secondary particles produced from the high-energy nuclear reactions have less mass and higher energy and are therefore less ionizing than those produced by lower-energy reactions.
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