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Title page for ETD etd-08222018-165404


Type of Document Dissertation
Author Liao, Wenjun
Author's Email Address Wenjun.liao@outlook.com
URN etd-08222018-165404
Title Radiation effects on microelectromechanical systems
Degree PhD
Department Electrical Engineering
Advisory Committee
Advisor Name Title
Michael L. Alles Committee Chair
Daniel M. Fleetwood Committee Member
Enxia Zhang Committee Member
Jimmy L. Davidson Committee Member
Robert A. Reed Committee Member
Ronald D. Schrimpf Committee Member
Sokrates T. Pantelides Committee Member
Keywords
  • MEMS
  • Total-Ionizaton-Dose
  • Displacement Damage
  • Piezoelectrc
  • Electrothermal
  • 2D Materials
  • Radiation Effects
  • Monte Carlo
Date of Defense 2018-06-25
Availability unrestricted
Abstract
The effects of ionizing radiation and displacement damage are two significant reliability

concerns for transducer applications in radiation environments. Microelectromechanical systems

(MEMS) are considered as potential transducer candidates for space systems and nuclear

reactors. The successful application of MEMS in radiation environments requires that these

reliability issues be thoroughly explored and understood. The total-ionizing-dose (TID) effects

on piezoelectric micromachined acoustic transducers (pMUTs) and electrothermal microscanners

were studied by using experimental characterization of mechanical and electronic property

changes due to radiation exposure and calculation of parametric changes. The radiation induced

charge accumulation changes the stress distribution in pMUTs and leads to resonant frequency

shifts. Also, the charge can move the electrothermal microscanner structures through the

electrostatic force and generate additional displacement offset. A new Monte Carlo modeling

approach is proposed for analyzing and calculating the defect density generated in suspended

monolayer graphene by energetic ion bombardment. The results help the understanding of

displacement damage in two dimensional materials.

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