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Title page for ETD etd-11222006-191734


Type of Document Dissertation
Author Taylor, Patrick Glen
URN etd-11222006-191734
Title Design and Analysis of Advanced CVD Diamond Dielectric Structures
Degree PhD
Department Electrical Engineering
Advisory Committee
Advisor Name Title
Professor Jim L. Davidson Committee Chair
Professor Alvin M. Strauss Committee Member
Professor Francis M. Wells Committee Member
Professor Norman H. Tolk Committee Member
Professor Weng P. Kang Committee Member
Keywords
  • conductivity
  • nucleation
  • monolthic
  • multi-layer
  • capacitors
  • diamond
  • grain boundaries
  • Diamond thin films
  • Dielectric films.
Date of Defense 2006-11-16
Availability unrestricted
Abstract
CVD diamond has proven to be a viable material for creating electrical devices. This research focuses on the advanced development and characterization of CVD diamond dielectric films.

It is shown in this research that the single most important parameter in the development of diamond dielectric capacitors is electrical conductivity. Conductivity affects all electric mechanisms in a polycrystalline diamond film. Part of this research effort was devoted to analyzing the conduction mechanisms of CVD diamond films. The control and/or suppression of these conduction mechanisms determine the dielectric properties of CVD diamond.

This research also focused on the design and development of advanced capacitor structures using CVD diamond. Earlier published work on diamond dielectrics has been limited to basic characterization experiments with simple capacitive structures. Experiments proceeded in this research that produced multi-layer diamond capacitor designs and prototypes.

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